About: http://webisa.webdatacommons.org/293293706

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A diagram in the note shows that Gartner generally remains skeptical about all alternatives, except moves to drive 193nm immersion lithography (193i) to smaller nodes.
http://www.w3.org/ns/prov#wasQuotedFrom	techdesignforums.com