About: http://webisa.webdatacommons.org/297074760

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	There are shallow trench structures comprising an insulating material such as silicon dioxide or intrinsic polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com