About: http://webisa.webdatacommons.org/297925393

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric insulating layers are preferably made of an inorganic insulation material, for example, silicon oxide, particularly silicon dioxide, silicon nitride, silicon having air gaps, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com