About: http://webisa.webdatacommons.org/300263401

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case of BPSG, the endpoint of the etch process could then be detected by monitoring the plasma for a change in concentration of BF, BH, PF, PH, BO, PO, or other B- and P-containing species.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com