| http://www.w3.org/ns/prov#value | - The phenomenon of occurrence of cracks on the surface of a polishing tool is a unique phenomenon occurring only at the time of dressing of a grindstone whose mechanical property is adjusted to be used for planarization of a semiconductor, and such a phenomenon as described has not occurred at the time of dressing a polishing pad formed of a polyurethane resin or the like which is a ductile materia
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