About: http://webisa.webdatacommons.org/305948007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposition structure provided by the method can be a substrate or a layered structural, made of materials such as silicon, metal, glass or plastic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com