About: http://webisa.webdatacommons.org/306118844

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The conductive barrier layer is formed by CVD, PECVD, or PVD. The conductive barrier layer is co-deposited with a halogen or the like such as fluorine.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de