| http://www.w3.org/ns/prov#value | - The above-described objects can be also achieved by an element concentration measuring apparatus comprising: X-ray source for irradiating X-rays at a prescribed angle to a sample to be measured including at least one film formed on a substrate; X-ray detector for detecting the X-rays reflected on the sample to be measured; and computer for computing a concentration of an element adhered on a surfa
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