| http://www.w3.org/ns/prov#value | - The other correction for reticle distortion is directly added to the dx or dy term of Equations 18-21 as the reference reticle error at the feature we are considering divided by M. Additional Embodiments [0145] Thus far, embodiments have been mainly described with respect to alignment attributes that are in the form of a box in box or frame in frame pattern as shown in FIG. 11A. Other alignment at
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