About: http://webisa.webdatacommons.org/30637402

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the load lock chamber 400 may include N substrate transfer chambers defined in a chamber body 548 separated by N???1 horizontal interior walls 514, where N is an integer greater than one.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com