| http://www.w3.org/ns/prov#value | - The content thereof is preferably from 0.01 to 0.7, more preferably from 0.05 to 0.50, most preferably from 0.05 to 0.40. [0230] In the case where the positive type resist composition of the invention is to be irradiated with ArF excimer laser light, the acid-decomposable resin preferably is a resin which has a monocyclic or polycyclic, aliphatic hydrocarbon structure and which comes to have enhan
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