| http://www.w3.org/ns/prov#value | - The...http://www.google.com/patents/US6935929?utm_source=gb-gplus-sharePatent US6935929 - Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpiecesAdvanced Patent SearchPublication numberUS6935929 B2Publication typeGrantApplication numberUS 10/425,467Publication dateAug 30, 2005Filing dateApr 28, 2003Priority dateApr 28, 2003
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