About: http://webisa.webdatacommons.org/309330818

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The tunnel dielectric layer 23 is formed of material such as an oxide layer and is thinner than the gate dielectric layer 21.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com