About: http://webisa.webdatacommons.org/3101217

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com