About: http://webisa.webdatacommons.org/311542103

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Still more, since the wafer does not contact directly with the jig, the temperature profile and temperature difference between the area of jig and other area may be minimized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca