About: http://webisa.webdatacommons.org/314361495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other words, for example, the number of the silicon members that can be processed simultaneously by one step such as the anisotropic etching, or the like is limited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com