| http://www.w3.org/ns/prov#value | - low rate between about 100 sccm and about 1,000 sccm, such as between about 100 sccm and about 700 sccm, maintaining the chamber pressure less than about 120 Torr, such as between about 1 Torr and about 50 Torr, for example, between about 1 Torr and about 5 Torr, and maintaining the deposition temperature between about 100??? C. and about 400??? C., such as between 175??? C. and about 350??? C., f
|
