About: http://webisa.webdatacommons.org/322411274

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the thus deposited oxide film is plasma-etched so that a portion thereof making contact the first gate electrode sidewall 16A remains unetched and the rest thereof is removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com