About: http://webisa.webdatacommons.org/323893659

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the pellicle provides an advantage that energy provided to a substrate such as a silicon wafer upon light exposure is increased.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com