About: http://webisa.webdatacommons.org/327251970

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The copper plug was formed similarly to Example 1, except for modifying the conditions of removing the stopper film to contain oxygen of Experiment 5 and omitting the oxygen plasma processing after the etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com