About: http://webisa.webdatacommons.org/327292540

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The CMP machine 110 further includes a dynamic under-pad 150 that dynamically modulates its compressibility to control the polishing rate, defects, planarity, and other characteristics of the polishing process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es