About: http://webisa.webdatacommons.org/328944231

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For a solid material having a tungsten film, the thickness of the tungsten film layer is substantially equal to 2.5 ??????n, where n is an integer and represents the number of complete cycles of the plurality of self-limiting reactions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com