| http://www.w3.org/ns/prov#value | - using sameUS5038048Dec 21, 1989Aug 6, 1991Hitachi, Ltd.Defect detection system and method for pattern to be inspected utilizing multiple-focus image signalsUS5056765May 25, 1990Oct 15, 1991Orbot Systems, Ltd.Immobilizing device particularly useful during processing or testing flat workpiecesUS5058982Aug 10, 1990Oct 22, 1991Orbot Systems Ltd.Illumination system and inspection apparatus including s
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