| http://www.w3.org/ns/prov#value | - Further, the lower electrode 30 may be formed to have a metal layer including at least one element selected from the group consisting of Ru, Ir, Sn, and In, an oxide layer including an oxide of at least one element selected from the group consisting of Ru, Ir, Sn, and In, or a compound layer including a compound of at least one element selected from the group consisting of Ru, Ir, Sn, and In and a
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