| http://www.w3.org/ns/prov#value | - Usually, the gate electrode is not particularly limited as long as it is used for a semiconductor device, and examples of thereof include a conductive film made of polysilicon, a metal such as copper or aluminum, a high-refractory metal such as tungsten, titanium or tantalum, and a silicide with the high refractory metal, in the form of a single-layer or multilayer film.
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