About: http://webisa.webdatacommons.org/336732945

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 4A, 4B, 4C, 4D, 4E and 4F show examples of a process for filling a concave between wirings on an interlayer insulating film according to this invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com