About: http://webisa.webdatacommons.org/342426772

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is further illustrated in FIG. 2A that over the resulting structure including the MOSFET, there is entirely formed a thick insulating oxide film 27, which is subsequently subjected into blanket etching, to plane the surface thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com