| http://www.w3.org/ns/prov#value | - Other types of conductors can be used as well for the plug structures 120, 121 as well, including for example aluminum and aluminum alloys, TiN, TaN, TiAlN or TaAlN. Other conductors that might be used comprise one or more elements selected from the group consisting of Ti, W, Mo, Al, Ta, Cu, Pt, Ir, La, Ni, Ru and O.
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