About: http://webisa.webdatacommons.org/345889883

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Starting from a material such as silicon, complex features may be disposed upon the substrate in forming the MEMS device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr