| http://www.w3.org/ns/prov#value | - etween 0.03 and 0.7 ??m, on the pad 16, principally made of aluminum, typically called an aluminum pad, exposed by the opening 14 a, a sputtered seed layer, made of copper, having a thickness of between 0.03 and 1 ??m, and preferably of between 0.03 and 0.7 ??m, on the tantalum-containing layer, an electroplated copper layer having a thickness of between 1 and 13 ??m on the sputtered seed layer, a
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