| http://www.w3.org/ns/prov#value | - echnology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS7081044Jun 12, 2002Jul 25, 2006Ebara CorporationPolishing apparatus and polishing padUS7094695Aug 21, 2002Aug 22, 2006Micron Technology, Inc.Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarizationUS7101251J
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