About: http://webisa.webdatacommons.org/352074122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, in the sputtering of oxygen containing materials such as indium tin oxide, zinc oxide and the like, energetic oxygen ions are created and these ions can mechanically or chemically damage the semiconductor body 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au