About: http://webisa.webdatacommons.org/355104353

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the embodiments described above, although a silicon substrate was used as the semiconductor substrate 11, a substrate made of a material other than silicon may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com