About: http://webisa.webdatacommons.org/357353755

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More particularly, the arrays of valves can be formed on the substrate using photo-lithographic mask and etch techniques, and the substrate may comprise a material such as silicon, glass, and/or quartz.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com