| http://www.w3.org/ns/prov#value | - An insulating film containing nitrogen or oxygen such as silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y), and silicon nitride oxide (SiNxOy) (x>y) (x and y are natural numbers) may be used as the inorganic material.
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