About: http://webisa.webdatacommons.org/360403925

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need for an improved method for fabricating a shallow trench isolation region that reduces the stress in the trench structure without resorting to high temperature anneal steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com