About: http://webisa.webdatacommons.org/36052378

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 400 multiple system regions of interest for a particular feature to be measured are produced depending upon whether the feature is a defect or a line width.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com