About: http://webisa.webdatacommons.org/362639322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, halogens other than fluorine can be used as the dopant in a dielectric film of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au