About: http://webisa.webdatacommons.org/365638869

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph which plots the number of particles larger than 0.12 microns (so called ???adders??? in FIG. 3) observed on wafers dried by gas (nitrogen) having various IPA concentrations and various flow rates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com