About: http://webisa.webdatacommons.org/367941782

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the first through electrode 120 may also be referred to as a TSV when the first through electrode 120 passes through a semiconductor chip formed of a material other than silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com