| http://www.w3.org/ns/prov#value | - The mirror 1340 is a torsional mirror comprising a silicon substrate 1810, drive electrodes 1825, 1830, bonding pads 1815, 1820, a bonded silicon plate 1850, and a thin film flexure layer 1845 made from a material such as silicon dioxide, silicon nitride, or silicon.
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