About: http://webisa.webdatacommons.org/370578517

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a dielectric etch chamber might be used to etch materials such as silicon dioxide or silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com