About: http://webisa.webdatacommons.org/375988091

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to a process for producing a semiconductor device, more particularly to a process for forming a multilevel interconnection.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com