| http://www.w3.org/ns/prov#value | - (a) a substrate; (b) first to N-th micro-machine switches wherein N is an integer equal to or greater than 2; and (c) a common signal line and first to N-th signal lines all formed on said substrate, a K-th micro-machine switch electrically connecting said common signal line to a K-th signal line and electrically disconnecting said common signal line from a K-th signal line wherein K is an integer
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