About: http://webisa.webdatacommons.org/382687010

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the manufacture of micromehanical structures that are not composed of silicon, materials other than silicon dioxide must therefore be used for sacrificial layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com