About: http://webisa.webdatacommons.org/384366895

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the deposition temperature is high, the group V elements, particularly N, escape easily from the deposited epitaxial layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au