About: http://webisa.webdatacommons.org/385127367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The cap layer may include a layer formed by depositing materials such as ruthenium.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com