About: http://webisa.webdatacommons.org/386985108

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate was a floating type and temperature was set at 300??? C. Ion energy for illuminating the substrate at this time was 25 eV and a film forming speed was 1 nm/min.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com