About: http://webisa.webdatacommons.org/38830851

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicide layer in the bottoms of the contact holes 30 to 33 can also be made of a refractory metal silicide other than TiSi2, such as CoSi2 (cobalt silicide), TaSi2 (tantalum silicide) or MoSi2 (molybdenum silicide).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr