About: http://webisa.webdatacommons.org/390110961

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As an example, there is a processing method based on the anisotropic etching technique for single crystal silicone, called bulk micromachining.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr